Importance of the Technology

The Technology in Brief

• Advantages
• Disadvantages
• Silicon-Micromachining Processes
  • Bulk Micromachining
  • Surface Micromachining
  • Chemical-Vapor Deposition
  • Sputtering
  • Lithography
  • Wet and Dry Etching
  • Wafer Bonding
• CMOS-based Micromachining
• Other Micromachining Processes
  • LIGA Process
  • Other Micromolding Processes
  • Additive Manufacturing
  • Laser Micromachining
  • Micro EDM
  • Print Forming
• Micromachining Materials
  • Nonsilicon Materials
  • Wear-Resistant Materials
• Sensing Principles
  • Piezoresistivity
  • Piezoelectricity
  • Capacitive Sensing
• Actuation Mechanisms
  • Electrostatic
  • Magnetic
  • Piezoelectric
  • Thermal
  • Artificial-Muscle and Electroactive-Polymer
• Common MEMS Devices
  • Pressure Sensors
  • Accelerometers
  • Gyroscopes
  • Inertial Measurement Units
  • Micromirrors
  • Microphones
• MEMS-Manufacturing Measurement Needs
• MEMS/Nano Interfaces

Commercial Development Parameters

• Demand Factors
  • Automotive Industry
  • Consumer Electronics and Wireless Devices
  • Health-Care Expenditures
  • Increasing Bandwidth
• General Constraints
  • Cost
  • Lack of Market Pull
  • Technical Immaturity
  • Packaging
• Synergistic Technologies
  • IC Technology
  • SOI Wafers
  • Packaging
• Competing Technologies
  • Nanotechnology
  • Conventional Approaches
  • Enhanced Machine Vision
• Required Resources
  • Access to Manufacturing
  • Multidisciplinary Approach
  • Design and Modeling
• Regulatory Factors
  • Safety and Security
  • Health-Care Approval
  • Environmental Legislation

Areas to Monitor

• Packaging
• Foundry Services
• Smart Sensors
• 3D Manufacturing
• SoC or SIP?
• Market Demand
• Sensor Commoditization
• Media Compatibility
• Development of New Materials
• Health Care
• Wireless Networking
• Upscaling or Downscaling
• NEMS
• Homeland Security

Implications of Commercialization

• The Connected Home
• Sensors for Harsh Environments
• Health Care and Drug Development
• Storage and Telecom Components
• Portable Devices for Environmental Sensing
• Implantable Medical Devices
• Use of Biological Analogies

Opportunities

• Overview
• Sensors
  • Advantages of Microfabricated Sensors
  • Disadvantages
  • Industry Structure
  • Commercial Opportunities
  • Automotive Sensors
  • Industrial Applications
  • Consumer Applications
  • Biomedical Applications
  • Unmanned Aerial Vehicles
• Silicon Microphones
  • Industry Structure
  • Commercial Opportunities
• Magnetic Hard-Disk-Drive Storage
  • Industry Structure
  • Commercial Opportunities
• Optical-Data Storage
• Projection Displays
• MEMS Flat-Panel Displays
• Scanning-Based Imaging
• Compound-Eye Cameras
• Optical Communications
  • Industry Structure
  • Commercial Opportunities
• Interconnects
• Process Control
• Microfiltration
• Microfluidics
• Drug-Delivery Systems
• DNA Chips
  • Industry Structure
  • Commercial Opportunities
• Lab on a Chip
  • Industry Structure
  • Commercial Opportunities
• Microreactors
  • Industry Structure
  • Commercial Opportunities
• Microenergy Sources
  • Industry Structure
  • Commercial Opportunities

Updates

Viewpoints Features

Abbreviations